4-6 August 1993, University of Wisconsin--Madison, Madison, Wisconsin / International Workshop on Plasma-Based Ion Implantation 1993 : University of Wisconsin--Madison) creator Conrad, John R Sridharan, Kumar Applied Science and Technology (ASTeX), Inc text bibliography conference publication nyu New York Published for the American Vacuum Society by the American Institute of Physics 1994 monographic eng

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p. 813-998 : ill. ; 30 cm. sponsored by Applied Science and Technology (ASTeX), Inc. ... [et al.] ; editors for the workshop, John R. Conrad, Kumar Sridharan. "Published in both 1994 March/April issue of the Journal of vacuum science and technology B, vol. 12, no. 2"--T.p. verso. Includes bibliographical references and index. Ion implantation Congresses TS695.25 .I57 1993 621.3815/2 2nd ser., v. 12, no. 2 DLC 940504 19970618142736.9 4968605